Model No. XR56 Pressure Regulator
The XR56 is a pressure-regulating valve developed for use with a variety of semiconductor gases and manufacturing apparatuses.
Feature
・This pressure regulator decreases the cost and size of the gas supply system, making it uniquely compact.
・Assembled, calibrated, inspected and packaged in a clean room (Class 10000) to minimize particles.
・Also available in combination with pressure gauge for secondary side pressure monitoring.