Model No. XR66 Compact Pressure Regulator
Various process gases
The XR66 is a small-sized pressure-regulating valve that can be used at the point-of-use for semiconductor processes. There are two types of joints available, one using any type of screw coupling and another using a
1.5 integrated type.
Feature
・Though small, it achieves a relatively large standard flow rate of 20L/min ＊1, and maximum flow rate of
50L/min. even with its miniaturized design. (Screw coupling-type)
・Internal capacity is a mere about 3.1mL, and the gas contact parts are processed with ultra-clean (UC)
technology.
・There are no screws that potentially generate outgasses or particles in the gas contact parts.
・The external seal are all made of metal seat.
・Improved durability and corrosion resistance of diaphragm are available through the use of hastelloy C-22 alloy.
＊1 Based on our standards. (For details, refer to the flow characteristics)