Model No. XR67 Model XR67 Pressure Regulator (For medium flow rate)
The XR67 is a medium flow rate pressure-regulating valve developed for semiconductor processing.
It is a high-quality, reliable product that was developed to prevent particle generation and gas retention.
Because the length and height of the joint are same, it can be replaced with XR64.
Feature
・It operates very smoothly, with minimal handle operation for secondary pressure.
・It fulfills all the conditions necessary to maintain a clean reaction atmosphere, thanks to the use of Ultra Clean
(UC) processing.
・We have improved the durability and corrosion resistance of the diaphragm through the standard use of Co-Ni
alloy.