Features

• The amplifier section (driver circuit) is incorporated into the detector section, resulting in a low price and compact dimensions.
• Allows low-cost building of typically expensive static monitoring systems.
• Permits switching between measuring ranges, allowing measurement over a wide range from low potential to high potential.
• The LED lamp informs of sensor failure and signals indicating the failure can be output externally.

Intended use

• Monitoring of charge quantity in the production process of flat-panel displays
• Monitoring of charge quantity of semiconductor wafers
• Monitoring of charge quantity during a process of handling LSIs or conveyance of printed wiring boards

Specifications