Model No. GW__ Semiconductor Use
The pressure gauge is designed for offering excellent performance even with highly pure semiconductor gas process media or in environmental atmosphere surrounded by corrosive gas. The gauge is suitable for the use in semiconductor process application, especially for highly-pure process media measurement with great care of air-tightness and air-cleanliness.
Feature
・Primarily internal components (Bourdon tube, socket, case and movement etc.) are made of stainless steel to
resist to corrosion both against process media and environmental atmosphere.
・The wetted parts like pressure sensing element are welded by argon arc welding and manufactured under strict
quality controls inspecting proof pressure and air-tightness.
・The case is equipped with a blowout disc＊. In case the Bourdon tube were to rupture, it would avoid the
damage of front window.
＊To maximize performance, please select the pressure range with your common operating pressure should be
30 to 65% of the pressure range. Furthermore, please ensure that the wetted parts materials listed are suitable
for the use against measuring gas or liquid.