Model No. ZT67 Compact Digital Pressure Gauge for Semiconductor Industry
The ZT67 is a Compact Digital Pressure Gauge, part of a lineup of products for the semiconductor industry divided by grade. It is equipped with a highly reliable pressure sensor that is much smaller and easier to read than conventional digital pressure gauges. From UC Grade to general-use options are available for measurement gases.
Feature
・The high corrosion resistant pressure sensor made of Co-Ni alloy or SUS316L is directly welded to the
316L st.st. coupling portion, demonstrating excellent corrosion resistance, air-tightness, stability and reliability.
＊Please confirm that material in contact with gas is suitable for it.
・Compact □ 30 mm size
・Large LED, Character height: 10 mm
・Comparator with 2 independent outputs
・Wide variety of fittings