Parameters ≡≡≡≡
Model |
VX3200 |
VX3200D |
Image Senor |
5M CMOS |
Monitor |
Built-in |
10.4" LCD (XGA:1024×768) |
|
Outside |
24" LCD (XGA:1920×1080) |
Acceptance Lens |
Object Space Telecentric Lens |
Light |
Casting Illumination System |
Four-segment illumination(White Light) |
Transmission Illumination System |
Telecentric transmission illumination(Green Light) |
Field of View |
Large field |
200mm×200mm(4 Angle R50) |
200mm×200mm(4 Angle R50) |
High precision |
/ |
130mm×130mm |
Repeatability |
Large field |
Without Stitching*1 |
±1um |
±1um |
With Stitching*2 |
±2um |
±2um |
High precision |
Without Stitching*1 |
/ |
±0.5um |
With Stitching*2 |
/ |
±1.5um |
Accuracy |
Large field |
Without Stitching*1 |
±5um |
±5um |
With Stitching*2 |
±(7+0.02L)μm |
±(7+0.02L)μm |
High precision |
Without Stitching*1 |
/ |
±2um |
With Stitching*2 |
/ |
±(4+0.02L)μm |
Height Meas.
(Physical Probe)
(Optional) |
Measuring Range(X*Y) |
60*110mm |
Max Depth |
75mm |
Dia. of Probe |
Φ1mm |
Measuring Force |
0.13N |
Repeatability*3 |
±3μm |
Accuracy*4 |
±(7.5+0.02L)μm |
Software |
VisionX |
Resolution |
0.1um |
XY Object Table |
X Travel range |
110mm(Motorized) |
Y Travel range |
110mm(Motorized) |
Loading Capacity |
5kg |
Z-Axis Travel range |
75mm(Motorized) |
Size(LxWxH) |
(531×368×731)mm |
Weight |
48kg |
49kg |
Input |
AC100~240V/50~60Hz |
Working Environment |
Temp.10℃~35℃, Humidity 30%~80%, Vibration<0.002g, Less than15Hz |
Remark:
*1 In the focus position, the environment temperature is +20 °C ± 1.0 °C
*2 In the focus position, the environment temperature is +20 °C ± 1.0 °C, and the load on the table is 2 kg or less; L is the moving range of the table (mm)
*3 Repeatability ±3μm in 80% measuring area
*4 The environment temperature is +20 °C ± 1.0 °C, and the load on the table is 2 kg or less; L is the moving range of the table (mm)
§≡≡≡≡ Applications ≡≡≡≡
VisionX software provides up to 80 extraction analysis tools, including [Feature Extraction] (such as maximum points, centerlines, arcs, peaks, etc.), [Accessory Tools] (such as any dot & line & circle, fitted straight line, Fit circle, tangent, inscribed circle, etc.), [Smart Labeling], [shape tolerance] , special [Application Tool] (such as pitch distance, pitch angle, slot, thread, round cross, down Angle, rounded corners, etc.)
The measurement results and their main statistical values (such as average, σ, 3σ, 6σ, Ca, Cp, Cpk, etc.) will be automatically recorded and archived. Operators can select different filter conditions for history extraction.
§≡≡≡≡ Stratistics ≡≡≡≡
The trend graph displays the regular trend of the measured values, such as the monotonic and periodic change of the measured values, which can be used for monitoring the abnormality of the production process of producing equipment. Reflecting the status and distribution of fluctuations in product quality, the histogram can intuitively expose information about the quality situation in producing process, which can be used to predict product quality and failure rate.
Through quality diagnosis and analysis with statistical methods, SPC can monitor the product quality and changing trend of the producing process. With SPC we can find the preventive solution in the producing process, so that the subsequent inspection and repair are reduced. Consequently, the producing process control and product quality improvement are achieved.