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SuperView W1 for Nano 3D Surface and Form

Mã sản phẩm: W1
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SuperView W1 for Nano 3D Surface and Form

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§≡≡≡≡  Description  ≡≡≡≡
SuperView W1 Optical 3D Surface profilometer is an ideal instrument for sub-Nanometer measurement of various precision parts. Based on the principle of white light interference technology, combined with precision Z-direction scanning module and 3D modeling algorithm, it contactlessly scans the surface of the object then establish a 3D image for the surface. A serial of 2D, 3D parameters  reflecting surface quality of the object are obtained after XtremeVision software processes and analyzes the 3D image.
 
The SuperView W1 is a user-friendly precision optical instrument with powerful analysis functions for all kinds of surface form & roughness parameters. With unique light source it could measure various precision parts with both smooth and rough surface.
 
§≡≡≡≡  Parameters  ≡≡≡≡
 
Light source Green LED
Video system 1024×1024
Optical lens 10×50× ,(Optional 2.5×5×20×100×)
Optical zoom 1×(Optional 0.5×0.75×)
Lens holder 3 holes-manual
XY Object table Size 200×200mm
Moving range 100×100mm(Customization is supported)
Loading capacity 10kg
Control method Motorized
Tilt ±4°Manual
Z Axis focusing Moving range 100mm
Control method Motorized
Scanning range of Z axis 2.2mm(bigger range is optional)
Resolution of Z axis 0.1nm
Max scanning speed 30µm/s
Stage measurement Uncertainty Repeatability
0.3% 0.08% 1σ
Remark: Performance parameters are tested by using a 4.7µm precision master stage gauge in lab according to ISO 4287 and ISO 25178.
 
Zoom ratio of lens 2.5× 5× 10× 20× 50× 100×
Numerical hole diameter 0.075 0.13 0.3 0.4 0.55 0.7
Optical resolution @550nm(µm) 3.7 2.1 0.92 0.69 0.5 0.4
Depth of focus(µm) 48.6 16.2 3.04 1.71 0.9 0.56
Working distance(mm) 10.3 9.3 7.4 4.7 3.4 2.0
Field H×V
(mm)
Video system
1024×1024
0.5× 3.84×3.84 1.92×1.92 0.96×0.96 0.48×0.48 0.192×0.192 0.096×0.096
0.75× 2.56×2.56 1.28×1.28 0.64×0.64 0.32×0.32 0.128×0.128 0.064×0.064
1× 1.92×1.92 0.96×0.96 0.48×0.48 0.24×0.24 0.096×0.096 0.048×0.048
 
※ Built-in ISO/ASME/EUR/GBT Standards of 2D, 3D parameters: 
2D Parameters
Standard Parameters
ISO 4287-1997   Principal section Roughness Waviness
Amplitude Pp, Pv ,Pz, Pc, Pt,Pa,Pq,Psk,Pku Rp, Rv ,Rz, Rc, Rt,Ra,Rq,Rsk,Rku Wp, Wv ,Wz, Wc, Wt,Wa,Wq,Wsk,Wku
interval PSm,Pdq RSm,Rdq WSm,Wdq
Substance Pmr,Pdc Rmr,Rdc,Rmr(Rz/4) Wmr,Wdc,Wmr(Wz/4)
Peak PPc RPc WPc
ISO 13565 ISO 13565-2 Rk,Rpk,Rvk,Mr1,Mr2,A1,A2,Rpk,Rvk
ISO 12085 Roughness graph R,AR,R× ,Nr
Waviness graph W,AW,W×,Wte
Other graph Rke,Rpke,Rvke
AMSE B46.1  2D Rt,Rp,Rv,Rz,Rpm,Rma×,Ra,Rq,Rsk,Rku,tp,Htp,Pc,Rda,Rdq,RSm,Wt
DIN EN ISO 4287-2010 Original profile Pa,Pq,Pp,Pv,Pz,Pc,Pt,PSk,PKu,PSm,PPc,Pdq,Pdc,Pmr,
Roughness Ra,Rq,Rp,Rv,Rz,Rc,Rt,RSk,RKu,RSm,RPc,Rdq,Rdc,Rmr,
Waviness Wa,Wq,Wp,Wv,Wz,Wc,Wt,WSk,WKu,WSm,WPc,Wdq,Wdc,Wmr
JIS B0601-2013 Original profile Pa,Pq,Pp,Pv,Pz,Pc,Pt,PSk,PKu,PSm,PPc,Pdq,Pdc,Pmr,
Roughness Ra,Rq,Rp,Rv,Rz,Rc,Rt,RSk,RKu,RSm,Rdq,Rdc,Rmr
Waviness Wa,Wq,Wp,Wv,Wz,Wc,Wt,WSk,WKu,WSm,WPc,Wdq,Wdc,Wmr
GBT 3505-2009 Original profile Pa,Pq,Pp,Pv,Pz,Pc,Pt,PSk,PKu,PSm,PPc,Pdq,Pdc,Pmr,
Roughness Ra,Rq,Rp,Rv,Rz,Rc,Rt,RSk,RKu,RSm,Rdq,Rdc,Rmr
Waviness Wa,Wq,Wp,Wv,Wz,Wc,Wt,WSk,WKu,WSm,WPc,Wdq,Wdc,Wmr
 
3D Parameters
Standard Parameters
ISO 25178 Height Sq,Ssk,Sku,Sp,Sv,Sz,Sa
function Smr,Smc,S×p
Space Sal,Str,Std
Composite parameters Sdq,Sdr
Volume Vm,Vv,Vmp,Vmc,Vvc,Vvv
Form Spd,Spc,S10z,S5p,S5v,Sda,Sha,Sdv,Shv
Functional Sk,Spk,Svk,Smr1,Smr2,Spq,Svq,Smq
ISO 12781 Flatness FLTt,FLTp,FLTv,FLTq
EUR 15178N Amplitude Sa,Sq,Sz,Ssk,Sku,Sp,Sv,St
Space Str,Std,Sal
Composite parameters Sdq,Sds,Ssc,Sdr,Sfd
Area, Volume Smr,Sdc
Function Sk,Spk,Svk,Sr1,Sr2,Spq,Svq,Smq
Functional Sbi,Sci,Svi
EUR 16145 EN Amplitude Sa,Sq,Sy,Sz,Ssk,Sku
Mixed parameters Ssc,Sdq,Sdr
Functional Sbi,Sci,Svi,Sk,Spk,Svk
Space Sds,Std,Stdi,Srw,Srwi
Hardness Hs,Hvol,Hv,Hps,Hpvol,Hpv,Hap,Hbp
ASME B46.1 3D St,Sp,Sv,Sq,Sa,Ssk,Sku,SWt
 
§≡≡≡≡  Applications  ≡≡≡≡
It is used for measurement and analysis of surface roughness and profile of precision components from industries of semi-conductor, 3C Electronics, ultraprecise machining, optical machining, micro-nano materials, micro-electro-mechanical system.

 
Measurement and analysis for various products, components and materials`surface form and profile characteristics, such as flatness, roughness, waviness, appearance, surface defect, abrasion,corrosion, gap, hole, stage, curvature, deformation, etc.
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